✦ LIBER ✦

Reactive ion etching of deep trenches in silicon with CF2Cl2 and O2

✍ Scribed by G Wöhl; M Matthes; A Weisheit

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive ion etching of keep trenches in

📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 125 KB

Highly anisotropic selective reactive io

✍ V.A. Yunkin; D. Fischer; E. Voges 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 355 KB

Reactive ion etching of selected polymer

✍ B. Hand; T. Long; B. C. Dems; F. Rodriguez 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 488 KB 👁 1 views

Characterization of plasma etching of mo

✍ R. Handke; G. Lippert 📂 Article 📅 1988 🏛 John Wiley and Sons 🌐 English ⚖ 494 KB

The study of GaAs reactive ion etching i

✍ AE Dulkin; VZ Pyataev; NO Sokolova; SA Moshkalyov; AS Smirnov; KS Frolov 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 429 KB

Selective reactive ion etching of PECVD

✍ M.Jagadesh Kumar; Savvas G. Chamberlain 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 415 KB