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Reactive ion etching of selected polymers in O2 and in CF4/O2

✍ Scribed by B. Hand; T. Long; B. C. Dems; F. Rodriguez

Publisher: John Wiley and Sons
Year: 1993
Tongue: English
Weight: 488 KB
Volume: 47
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.1993.070471207

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