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Parametric investigations and simulations of ion beam etching and reactive ion etching mechanisms for GaAs compounds

✍ Scribed by K. Ketata; S. Koumetz; O. Latry; M. Ketata; R. Debrie

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
323 KB
Volume
28
Category
Article
ISSN
0921-5107

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