✦ LIBER ✦

Reactive ion etching of GaAs and related materials for electro-optic and other devices

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A study of selective and nonselective re

✍ Y.K. Su; Y.Z. Juang; S.C. Shei; B.C. Fang 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 693 KB

6194. Anisotropic reactive ion etching t

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 192 KB

MOVPE growth and characterization of InG

✍ N. Agrawal; D. Franke; N. Grote; F.W. Reier; H. Schroeter-Janssen 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 468 KB

Ion-assisted processing of GaAs for opti

📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 118 KB

Reactive ion etching of crystalline quar

📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 140 KB

Reactive ion etching of submicron MoSi2/

📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 63 KB