✦ LIBER ✦
Reactive ion etching of submicron MoSi2/poly-Si gates for CMOS/SOS devices : Eugene C. Whitcomb and A. B. Jones. Solid St. Technol., 121 (April 1982)
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 63 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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