✦ LIBER ✦
6194. Anisotropic reactive ion etching technique of GaAs and AlGaAs materials for integrated optical device fabrication: Hirohito Yamada et al, J Vac Sci Technol, B3, 1985, 884–888
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 192 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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