✦ LIBER ✦
Reactive ion etching of crystalline quartz for SAW devices : B. Spangenberg, K. Popova, V. Orlinov, E. Spasova and G. Danev. Vacuum 39(5), 453 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 140 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.