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Crystallization of silicon nitride thin films synthesized by plasma-enhanced chemical vapour deposition

✍ Scribed by Neerushana Jehanathan; Martin Saunders; Yinong Liu; John Dell

Book ID: 113896839
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 449 KB
Volume: 57
Category: Article
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2007.06.035

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