✦ LIBER ✦
Plasma-enhanced chemical vapour deposition of amorphous silicon nitride for thin film diode active matrix liquid crystal displays
✍ Scribed by G. Oversluizen; W.H.M. Lodders; I.D. French
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 306 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0040-6090
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