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Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films

✍ Scribed by Koh, Joohyun; Lu, Yiwei; Wronski, C. R.; Kuang, Yalei; Collins, R. W.; Tsong, T. T.; Strausser, Y. E.

Book ID: 121313295
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 418 KB
Volume: 69
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.117397

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