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Composition, structure and properties of SiNx films fabricated by pulsed reactive closed-field unbalanced magnetron sputtering

✍ Scribed by Zh.Q. Yao; P. Yang; N. Huang; H. Sun; G.J. Wan; Y.X. Leng; J.Y. Chen

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 470 KB
Volume: 240
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.06.004

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