Studies of the composition, tribology and wetting behavior of silicon nitride films formed by pulsed reactive closed-field unbalanced magnetron sputtering

✍ Scribed by Zh.Q. Yao; P. Yang; N. Huang; J. Wang; F. Wen; Y.X. Leng

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 272 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.075