Reactive magnetron sputtering of Al doped ZnO films: dependence of optical, electrical, compositional and structural properties on deposition conditions

✍ Scribed by K. Ellmer; F. Kudella; R. Mientus; R. Schieck; S. Fiechter

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 309 KB
• Volume: 70-71
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90606-c