Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating

✍ Scribed by Guojun Zhang; Bin Li; Bailing Jiang; Fuxue Yan; Dichun Chen

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 542 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.06.090