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Composition and crystal structure of carbon nitride films prepared by the electron cyclotron resonance plasma sputtering method

✍ Scribed by Tani, Youji; Aoi, Yoshifumi; Kamijo, Eiji


Book ID
121352066
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
337 KB
Volume
73
Category
Article
ISSN
0003-6951

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