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The structure and tribological property of amorphous carbon and carbon nitride films prepared by ECR plasma sputtering method

✍ Scribed by Ohana, T; Goto, A; Yamamoto, K; Nakamura, T; Tanaka, A; Osawa, Y; Yoda, H; Sahashi, M; Koga, Y

No coin nor oath required. For personal study only.

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