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Composition, structure and tribological properties of amorphous carbon nitride coatings

✍ Scribed by Dong Li; Eric Cutiongco; Yip-Wah Chung; Ming-Show Wong; William D. Sproul


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
425 KB
Volume
68-69
Category
Article
ISSN
0257-8972

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Unhydrogenated amorphous carbon films were deposited at different temperatures on a single silicon wafer by a process known as Filtered Cathodic Vacuum Arc. A transition from diamond-like properties to graphitic properties was observed at the substrate temperature of 200 Β°C. This change of propertie