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Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma

✍ Scribed by Bhattacharyya, Somnath; Vallée, C.; Cardinaud, C.; Turban, G.


Book ID
121790001
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
401 KB
Volume
87
Category
Article
ISSN
0021-8979

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