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Mechanical properties of DLC films prepared in acetylene and methane plasmas using electron cyclotron resonance microwave plasma chemical vapor deposition

โœ Scribed by Lai, K.H.; Chan, C.Y.; Fung, M.K.; Bello, I.; Lee, C.S.; Lee, S.T.


Book ID
123089245
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
522 KB
Volume
10
Category
Article
ISSN
0925-9635

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