✦ LIBER ✦

Chemical and structural analysis of crystalline carbon nitride thin films prepared by electron cyclotron resonance plasma sputtering process

✍ Scribed by Tani, Y.; Aoi, Y.; Kamijo, E.

Book ID: 120391430
Publisher: EDP Sciences
Year: 1999
Weight: 863 KB
Volume: 09
Category: Article
ISSN: 1155-4339
DOI: 10.1051/jp4:19998141

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