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Preparation of turbostratic and cubic boron-nitride films by electron-cyclotron-resonance, plasma-assisted, chemical vapour deposition

✍ Scribed by T. Goto; T. Tanaka; H. Masumoto; T. Hirai

Publisher: Springer US
Year: 1994
Tongue: English
Weight: 748 KB
Volume: 5
Category: Article
ISSN: 0957-4522
DOI: 10.1007/bf00215567

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