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Preparation of cubic boron nitride films by plasma-enhanced chemical vapour deposition of BF3, N2 and H2 gas mixtures

✍ Scribed by Juan Manuel Mendez; Stephen Muhl; Mario Farias; Gabriel Soto; Leonel Cota-Araiza

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
431 KB
Volume
49
Category
Article
ISSN
0257-8972

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## Abstract Boron nitride (BN) films with high crystallinity and phase purity (>80 %) in the cubic phase were synthesized over large areas using fluorine chemistry and electron–cyclotron resonance (ECR) microwave plasma. Plasma‐enhanced fluorine chemistry was provided by a complex H~2~–BF~3~–N~2~–A