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Optical gap of fluorinated amorphous carbon films prepared by electron cyclotron resonance trifluromethane and benzene plasmas

✍ Scribed by Ye, Chao; Ning, Zhaoyuan; Cheng, Shanhua; Xin, Yu; Xu, Shenhua


Book ID
119996437
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
507 KB
Volume
13
Category
Article
ISSN
0925-9635

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