Comparison of the Pyrolysis Products of Dichlorodimethylsilane in the Chemical Vapor Deposition of Silicon Carbide on Silica in Hydrogen or Argon

✍ Scribed by Domenick E. Cagliostro; Salvatore R Riccitiello; Jian Ren; Farshad Zaghi

• Book ID: 110826635
• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 592 KB
• Volume: 77
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.1994.tb04667.x