Initial decomposition of methyltrichlorosilane in the chemical vapor deposition of silicon-carbide

✍ Scribed by Xin Wang; Kehe Su; Juanli Deng; Yan Liu; Yanli Wang; Qingfeng Zeng; Laifei Cheng; Litong Zhang

• Book ID: 116379872
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 494 KB
• Volume: 967
• Category: Article
• ISSN: 2210-271X
• DOI: 10.1016/j.comptc.2011.04.028