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Analysis of the Pyrolysis Products of Dimethyldichlorosilane in the Chemical Vapor Deposition of Silicon Carbide in Argon

โœ Scribed by Domenick E. Cagliostro; Salvatore R. Riccitiello; Marty G. Carswell


Book ID
110824876
Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
770 KB
Volume
73
Category
Article
ISSN
0002-7820

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