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Model for the Formation of Silicon Carbide from the Pyrolysis of Dichlorodimethylsilane in Hydrogen: I, Silicon Formation from Chlorosilanes

✍ Scribed by Domenick E. Cagliostro; Salvatore R. Riccitiello


Book ID
110826111
Publisher
John Wiley and Sons
Year
1993
Tongue
English
Weight
623 KB
Volume
76
Category
Article
ISSN
0002-7820

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The formation of thin silicon carbide films for various uses is of technological intercst but still presents some problems. In many cases. the film produced has an cxccss or deficiency of carbon or silicon.[lJ One reason for this is that the precursor gas generally used is a mixture of several compo