𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Model for the Formation of Silicon Carbide from the Pyrolysis of Dichlorodimethylsilane in Hydrogen: II, Silicon Carbide Formation from Silicon and Methane

✍ Scribed by Domenick E. Cagliostro; Salvatore R. Riccitiello

Book ID
110826112
Publisher
John Wiley and Sons
Year
1993
Tongue
English
Weight
396 KB
Volume
76
Category
Article
ISSN
0002-7820

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

The formation of silicon carbide films f
The formation of silicon carbide films from disilane derivatives
✍ Prof. Edwin Hengge; Dr. Arno Zechmann; Dr. Ferdinand Hofer; Dr. Peter PΓΆlt; Dr. πŸ“‚ Article πŸ“… 1994 πŸ› John Wiley and Sons 🌐 English βš– 481 KB πŸ‘ 1 views

The formation of thin silicon carbide films for various uses is of technological intercst but still presents some problems. In many cases. the film produced has an cxccss or deficiency of carbon or silicon.[lJ One reason for this is that the precursor gas generally used is a mixture of several compo

Hydrogen Chloride Effects on the CVD of
Hydrogen Chloride Effects on the CVD of Silicon Carbide from Methyltrichlorosilane
✍ George D. Papasouliotis; Stratis V. Sotirchos πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 645 KB

A comprehensive experimental investigation of the effects of hydrogen chloride concentration on the deposition rate and stoichiometry of SiC films produced through thermal decomposition of methyltrichlorosilane (MTS, CH 3 SiCl 3 ) is carried out in a gravimetric hot wall reactor of tubular geometry.