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Cleaning of Si and properties of the HfO[sub 2]âSi interface

✍ Scribed by Choi, K.; Harris, H.; Gangopadhyay, S.; Temkin, H.

Book ID: 121228715
Publisher: AVS (American Vacuum Society)
Year: 2003
Tongue: English
Weight: 548 KB
Volume: 21
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1569922

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