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Si dangling-bond-type defects at the interface of (100)Si with ultrathin HfO[sub 2]

✍ Scribed by Stesmans, A.; Afanas’ev, V. V.


Book ID
121279332
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
360 KB
Volume
82
Category
Article
ISSN
0003-6951

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