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Identification of sub-band-gap absorption features at the HfO[sub 2]∕Si(100) interface via spectroscopic ellipsometry

✍ Scribed by Price, J.; Lysaght, P. S.; Song, S. C.; Li, Hong-Jyh; Diebold, A. C.


Book ID
120308930
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
451 KB
Volume
91
Category
Article
ISSN
0003-6951

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