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Multibit memories using a structure of SiO[sub 2]/partially oxidized amorphous SiâHfO[sub 2]

✍ Scribed by Park, Sangjin; Cha, Young-Kwan; Cha, Daigil; Park, Youngsoo; Yoo, In-Kyeong; Lee, Jung-Hyun; Seol, Kwang Soo; Choi, Suk-Ho

Book ID: 120275881
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 660 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2219999

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Multibit memories using a structure of SiO[sub 2]/partially oxidized amorphous SiâHfO[sub 2]

Multibit memories using a structure of SiO[sub 2]/partially oxidized amorphous SiâHfO[sub 2]