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Characterization of Multilayer Metal Gate Fuse in 28-nm CMOS Logic Technology

✍ Scribed by Hsieh, Min-Che; Lin, Yu-Cheng; Chin, Yung-Wen; Chang, Tzong-Sheng; King, Ya-Chin; Lin, Chrong-Jung

Book ID: 126635496
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 825 KB
Volume: 34
Category: Article
ISSN: 0741-3106
DOI: 10.1109/LED.2013.2272475

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