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[IEEE 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu, Taiwan (2014.4.28-2014.4.30)] Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Threshold voltage tuning by metal gate work function modulation for 10 nm CMOS integration and beyond

✍ Scribed by Yoshida, Naomi; Keping Han, ; Peng-Fu Hsu, ; Beach, Matthew; Xinliang Lu, ; Hung, Raymond; Daxin Mao, ; Hao Chen, ; Wei Tang, ; Yu Lei, ; Jing Zhou, ; Noori, Atif; Miao Jin, ; Kun Xu, ; Phatak, Anup; Shiyu Sun, ; Hassan, Sajjad; Gandikota, Srinivas; Chorng-Ping Chang, ; Brand, Adam

Book ID: 127268877
Publisher: IEEE
Year: 2014
Weight: 806 KB
Category: Article
ISBN: 147992217X
DOI: 10.1109/vlsi-tsa.2014.6839647

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