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Characterization of GeSi layers formed by high dose Ge implantation into Si

✍ Scribed by W.Y. Cheung; S.P. Wong; I.H. Wilson; T.H. Zhang


Book ID
113286546
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
283 KB
Volume
101
Category
Article
ISSN
0168-583X

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