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The evolution of the Si/SiO2 interface in buried oxide layers formed by high dose oxygen implantation into silicon

✍ Scribed by R.J. Chater; J.A. Kilner; P.L.F. Hemment; K.J. Reeson; J.R. Davis

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Oxygen distributions in synthesized SiO2

✍ PLF Hemment; E Maydell-Ondrusz; KG Stevens; JA Kilner; J Butcher 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 579 KB

Formation of buried oxide layers by high

✍ K. Das; J. B. Butcher; K. V. Anand 📂 Article 📅 1984 🏛 Springer US 🌐 English ⚖ 646 KB

Optical and compositional studies of bur

✍ R.J. Chater; J.A. Kilner; E. Scheid; S. Cristoloveneau; P.L.F. Hemment; K.J. Ree 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 353 KB

SIMS and 18O tracer studies of the redis

✍ J.A. Kilner; R.J. Chater; P.L.F. Hemment; R.F. Peart; E.A. Maydell-Ondrusz; M.R. 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 529 KB

A SIMS and TEM analysis of the growth me

✍ C.J. Griffin; J.A. Kilner; R.J. Chater; A. Staton-Bevan; K.J. Reeson; P.L.F. Hem 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 500 KB

Formation of buried insulating layers in

✍ P.L.F. Hemment; E. Maydell-Ondrusz; K.G. Stephens; J. Butcher; D. Ioannou; J. Al 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 534 KB