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SIMS and 18O tracer studies of the redistribution of oxygen in buried SiO2 layers formed by high dose implantation

✍ Scribed by J.A. Kilner; R.J. Chater; P.L.F. Hemment; R.F. Peart; E.A. Maydell-Ondrusz; M.R. Taylor; R.P. Arrowsmith

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

18O isotope studies on the redistributio

✍ R.J. Chater; J.A. Kilner; K.J. Reeson; A.K. Robinson; P.L.F. Hemment 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 530 KB

Modelling of 18O tracer studies of the o

✍ H.U. Jager; J.A. Kilner; R.J. Chater; P.L.F. Hemment; R.F. Peart; K.J. Reeson 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 504 KB

The evolution of the Si/SiO2 interface i

✍ R.J. Chater; J.A. Kilner; P.L.F. Hemment; K.J. Reeson; J.R. Davis 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 308 KB

SIMS analysis of buried silicon nitride

✍ J.A. Kilner; R.J. Chater; P.L.F. Hemment; R.F. Peart; K.J. Reeson; R.P. Arrowsmi 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 418 KB

Optical and compositional studies of bur

✍ R.J. Chater; J.A. Kilner; E. Scheid; S. Cristoloveneau; P.L.F. Hemment; K.J. Ree 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 353 KB

A SIMS and TEM analysis of the growth me

✍ C.J. Griffin; J.A. Kilner; R.J. Chater; A. Staton-Bevan; K.J. Reeson; P.L.F. Hem 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 500 KB