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Characterization of SiGe/Si heterostructures formed by Ge+ and C+ implantation

✍ Scribed by A. Fukami; K. Shoji; T. Nagano; C. Y. Yang


Book ID
126482330
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
563 KB
Volume
57
Category
Article
ISSN
0003-6951

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