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Oxygen segregation and Ge diffusion in annealed oxygen ion-implanted relaxed SiGe/Si heterostructures

✍ Scribed by Zhenghua An; Miao Zhang; Ricky K. Y. Fu; Paul K. Chu; Chenglu Lin

Publisher: Springer US
Year: 2004
Tongue: English
Weight: 401 KB
Volume: 33
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-004-0181-z

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