Self-assembled SiGe quantum dots embedded in Ge matrix by Si ion implantation and subsequent annealing

✍ Scribed by Wen-ting Xu; Hai-ling Tu; Da-li Liu; Ran Teng; Qing-hua Xiao; Qing Chang

• Publisher: Springer Netherlands
• Year: 2012
• Tongue: English
• Weight: 485 KB
• Volume: 14
• Category: Article
• ISSN: 1388-0764
• DOI: 10.1007/s11051-011-0682-7