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Formation of unstrained Si1−xGex. layers by high-dose 74Ge ion implantation in SIMOX

✍ Scribed by B. Holländer; S. Mantl; W. Michelsen; S. Mesters; A. Hartmann; L. Vescan; D. Gerthsen

Book ID
113285767
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
517 KB
Volume
84
Category
Article
ISSN
0168-583X

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