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Laser induced epitaxial regrowth of Si1-xGex/Si layers produced by Ge ion implantation

✍ Scribed by M. Berti; G. Mazzi; A.V. Drigo; A. Migliori; E. Jannitti; S. Nicoletti


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
586 KB
Volume
43
Category
Article
ISSN
0169-4332

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