✦ LIBER ✦
Furnace and cw Ar laser induced solid-phase epitaxial regrowth of SOS films implanted with Si, Si + B, P and P + B ions
✍ Scribed by I. Golecki; G. Kinoshita; B.M. Paine
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 698 KB
- Volume
- 182-183
- Category
- Article
- ISSN
- 0029-554X
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