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Morphology of Si1−xGex thin crystalline films obtained by pulsed-excimer-laser annealing of heavily Ge-implanted Si

✍ Scribed by E.L. Mathé; A. Naudon; F. Repplinger; E. Fogarassy


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
649 KB
Volume
86
Category
Article
ISSN
0169-4332

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