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Challenges for predictive process simulation in sub 0.1 μm silicon devices

✍ Scribed by J.D. Plummer; P.B. Griffin

Book ID: 113287654
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 799 KB
Volume: 102
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)80135-9

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