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Atomic layer deposition of nanolaminate oxide films on Si

✍ Scribed by M. Tallarida; M. Weisheit; K. Kolanek; M. Michling; H. J. Engelmann; D. Schmeisser

Book ID: 106477992
Publisher: Springer Netherlands
Year: 2011
Tongue: English
Weight: 552 KB
Volume: 13
Category: Article
ISSN: 1388-0764
DOI: 10.1007/s11051-011-0319-x

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