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Atomic Layer Deposition and Properties of Lanthanum Oxide and Lanthanum-Aluminum Oxide Films

✍ Scribed by K. Kukli; M. Ritala; V. Pore; M. Leskelä; T. Sajavaara; R. I. Hegde; D. C. Gilmer; P. J. Tobin; A. C. Jones; H. C. Aspinall

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
447 KB
Volume
12
Category
Article
ISSN
0948-1907

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