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ChemInform Abstract: Deposition of Lanthanum Zirconium Oxide High-k Films by Liquid Injection ALD and MOCVD.

✍ Scribed by Jeffrey M. Gaskell; Anthony C. Jones; Paul R. Chalker; Matthew Werner; Helen C. Aspinall; Stephen Taylor; Pouvanart Taechakumput; Peter N. Heys

Publisher
John Wiley and Sons
Year
2008
Weight
18 KB
Volume
39
Category
Article
ISSN
0931-7597

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