✦ LIBER ✦
ChemInform Abstract: Epitaxial Growth of Cubic SiC Films on Si Substrates by High Vacuum Chemical Vapor Deposition Using 1,3-Disilabutane.
✍ Scribed by K.-W. LEE; K.-S. YU; J.-H. BOO; Y. KIM; T. HATAYAMA; T. KIMOTO; H. MATSUNAMI
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 29 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0931-7597
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