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Tuning the Composition and Nanostructure of Pt/Ir Films via Anodized Aluminum Oxide Templated Atomic Layer Deposition

✍ Scribed by David J. Comstock; Steven T. Christensen; Jeffrey W. Elam; Michael J. Pellin; Mark C. Hersam


Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
529 KB
Volume
20
Category
Article
ISSN
1616-301X

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